Elliott, David J. <br/><br/>
Integrated circuit fabrication technology / 
by David J. Elliott. 
 - New York :  McGraw-Hill,  1982. 
 - 405 p. :  ill. ;  24 cm 
<br/><br/>Includes bibliographies and index. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.