Veronis, Andrew M. <br/><br/>
Integrated circuit fabrication technology / 
Andrew Veronis. 
 - Reston, Va. :  Reston Pub. Co,  1979. 
 - x, 193 p.  ill. ;  24 cm. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>0835930920 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits.