TY  - BOOK
ED  - Institute of Electrical and Electronics Engineers.
TI  - IEEE transactions on semiconductor manufacturing
PY  - 1991///
CY  - New York
PB  - The Institute of Electrical and Electronics Engineers
KW  - Semiconductor industry
KW  - Periodicals
KW  - Semiconductor industrial equipment industry
KW  - Semiconductor production equipment industry
KW  - Semiconductors
ER  -