IEEE transactions on semiconductor manufacturing. 

 - New York :  The Institute of Electrical and Electronics Engineers,  1991. 
 - 2 v. ; 29 cm. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor industry--Periodicals.<br/>Semiconductor industrial equipment industry--Periodicals.<br/>Semiconductor production equipment industry--Periodicals.<br/>Semiconductors--Periodicals.