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Ultra shallow junction formation for nano devices applications by dopant diffusion from spin on dopant [article] / Uda Hashim

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Uda Hashim

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Malaysia. Kementerian Pengajian Tinggi

Publication details: Putrajaya : Kementerian Pengajian Tinggi Malaysia, 2010 In: Technology and engineering : directory of research projects fundamental research grant scheme (FRGS) phase 1/2006 [article] (jil.2) 2010, p.172-183

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