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MEMS [electronic resource] : a practical guide to design, analysis, and applications / edited by Jan G. Korvink, Oliver Paul.

Contributor(s): Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006.Description: xxv, 965 p. : ill., digital ; 24 cmISBN:
  • 9783540336556 (electronic bk.)
  • 9783540211174 (paper)
Subject(s): DDC classification:
  • 621 22
LOC classification:
  • TK7875 .M42 2006
Online resources: In: Springer eBooks
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