Fabrication of silicon microprobes for optical near-field applications [electronic resource] / Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi.

By:

Minh, Phan Ngoc

Contributor(s):

Takahito, Ono
Esashi, Masayoshi, 1949-

Publication details: Boca Raton, Fla. : CRC Press, c2002.Description: 180 p. : ill. ; 25 cmISBN:

0849311543

Subject(s):

Micromachining
Silicon
Near-field microscopy
Microprobe analysis

DDC classification:

621.36 21

Online resources:

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CRCnetBASE Click here for the electronic version

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Fabrication of silicon microprobes for optical near-field applications [electronic resource] / Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi.

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