Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor : Norbert Kockmann

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Series: Advanced micro & nanosystems ; 5Publication details: Weinheim : Wiley-VCH , 2006Description: xxii, 507 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Date due	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TS183.M53 3 (Browse shelf(Opens below))		1	Available		00001471321

Includes bibliographical references and index

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