MEMS/NEMS : handbook techniques and applications / edited by Cornelius T. Leondes

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Publication details: New York : Springer, 2005Description: 5 v. : ill. ; 25 cmISBN:

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Contents:

v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications

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Item type	Current library	Home library	Call number	Materials specified	Copy number	Status	Barcode
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK153.M46 (Browse shelf(Opens below))	j. 2	1	Available	00001474683
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK153.M46 (Browse shelf(Opens below))	j. 3	1	Available	00001474684
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK153.M46 (Browse shelf(Opens below))	j. 4	1	Available	00001474685
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK153.M46 (Browse shelf(Opens below))	j. 5	1	Available	00001474686
AM	PERPUSTAKAAN LINGKUNGAN KEDUA	PERPUSTAKAAN LINGKUNGAN KEDUA KOLEKSI AM-P. LINGKUNGAN KEDUA	TK153.M46 (Browse shelf(Opens below))	j. 1	1	Available	00001474682

Includes bibliographical references and index

v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications

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