MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01173nam a2200313 a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20250930113858.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
020717s2002 xxka 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0852960395 |
| Terms of availability |
RM287.63 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
200301031453 |
| Level of effort used to assign nonsubject heading access points |
nuri |
| Level of effort used to assign subject headings |
200212101016 |
| Level of effort used to assign classification |
laili |
| y |
07-17-2002 |
| z |
sanusi |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85.S54 |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Silicon wafer bonding technology for VLSI and MEMS applications / |
| Statement of responsibility, etc. |
edited by Subramanian S. Iyer and Andre J. Auberton-Herve |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
London : |
| Name of publisher, distributor, etc. |
INSPEC, |
| Date of publication, distribution, etc. |
2002 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxv, 149 p. : |
| Other physical details |
ill. |
| Dimensions |
26 cm. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
EMIS processing series ; |
| Volume/sequential designation |
no. 11 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon-on-insulator technology |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Very large scale integration |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Iyer, Subramanian S. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Auberton-Herve, Andre J. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
Institution of Electrical Engineers |
| 9 (RLIN) |
38275 |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
Electronic Materials Information Service |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) |
|---|
| a |
.b13055446 |
| b |
2021-05-28 |
| c |
2019-11-12 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
AM |
| Suppress in OPAC |
No |
| Call number prefix |
TK7871.85.S54 |
| 914 ## - VTLS Number |
|---|
| VTLS Number |
vtls000318005 |
| 991 ## - LOCAL NOTE (NAMA FAKULTI/INSTITUT/PUSAT) |
|---|
| a |
KEJ -Pascasiswazah |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) |
|---|
| Library |
PERPUSTAKAAN LINGKUNGAN KEDUA |
| Operator's initials, OID (RLIN) |
2002-04-07 |
| Cataloger's initials, CIN (RLIN) |
m |
| Material Type (Sierra) |
Printed Books |
| Language |
English |
| Country |
|
| -- |
0 |
| -- |
.b13055446 |
