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Handbook of thin film process technology /

Handbook of thin film process technology / editors, David A Glocker , S Ismat Shah. - Bristol : Institute of Physics, 1995. - 1 v. (various pagings) : ill. ; 32 cm.

ISBN: 0750303115 RM1,033.72

Subjects--Topical Terms:
Thin films--Handbooks, manual, etc.
Surfaces (Technology)--Handbooks, manual, etc.

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Handbook of thin film process technology /

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