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Glow discharge processes : sputtering and plasma etching /

Chapman, Brian NPlasma etching

Glow discharge processes : sputtering and plasma etching / Brian Chapman - New York : Wiley, 1980 - 406p. : ill. ; 24 cm.

'A Wiley-Interscience publication.'

Includes bibliographical references and index

ISBN: 047107828X 26.95 (est.)

Subjects--Topical Terms:
Sputtering (Physics)
Glow discharges

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Glow discharge processes : sputtering and plasma etching /

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