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Fundamentals of semiconductor processing technology /

El-Kareh, Badih

Fundamentals of semiconductor processing technology / by Badih El-kareh ; graphics and layout: Richard J. Bombard - Boston : Kluwer Academic Publishers, 1995 - 599 p. : ill. ; 25 cm.

Cover title: Fundamentals of semiconductor processing technologies

ISBN: 0792395344 RM354.90

Subjects--Topical Terms:
Semiconductors--Design and construction
Manufacturing processes

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