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Fine line lithography /

Fine line lithography / edited by Roger Newman - Amsterdam : North-Holland Publishing Company, 1980 - 481 p. : ill. ; 24 cm. - Materials processing, theory and practices ; vol. 1 .

Includes bibliographical references (p.477-478) and index

ISBN: 0444853510

LCCN: 80-13154

Subjects--Topical Terms:
Integrated circuits--Large scale integration
Lithography

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Fine line lithography /

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