Functional thin films and nanostructures for sensors synthesis, physics and applications /
Functional thin films and nanostructures for sensors synthesis, physics and applications / [electronic resource] :
edited by Jeffrey Fortin, Anis Zribi.
- Boston, MA : Springer-Verlag US, 2009.
- xvii, 213 p. : ill., digital ; 24 cm.
- Integrated analytical systems .
9780387686097 (electronic bk.) 9780387362298 (paper)
Thin film devices.
Nanoelectromechanical systems.
Detectors.
Nanotechnology.
Material Science.
Characterization and Evaluation of Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Optical and Electronic Materials.
TK7872.T55 / F86 2009
621.38152
9780387686097 (electronic bk.) 9780387362298 (paper)
Thin film devices.
Nanoelectromechanical systems.
Detectors.
Nanotechnology.
Material Science.
Characterization and Evaluation of Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Optical and Electronic Materials.
TK7872.T55 / F86 2009
621.38152