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Sensor dan aktuator MEMS perkembangan & kegunaan /

Sensor dan aktuator MEMS perkembangan & kegunaan / disunting oleh Burhanuddin Yeop Majlis. - 293 pages : illustrations ; 23 cm.

Includes bibliographical references : pages [269]-283) and index.

ISBN: 9789674126681 Hadiah

Subjects--Topical Terms:
Microelectromechanical systems.
Actuators.
Detectors.

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Sensor dan aktuator MEMS perkembangan & kegunaan /

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