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Dry etching for microelectronics /

Dry etching for microelectronics / edited by Ronald A. Powell. - Amsterdam : North-Holland Publishing Company, 1984. - 299 p. : ill. ; 24 cm. - Materials processing theory and practices ; v.4. .

Includes bibliographical references and index.

ISBN: 0444869050

Subjects--Topical Terms:
Semiconductors--Etching.
Plasma etching.

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