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(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications /

Noraini Marsi,

(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications / Noraini binti Marsi. - xxvii, 233 pages : illustrations (some colour) ; 30 cm.

Thesis (PhD.) - Universiti Kebangsaan Malaysia, 2015.

References : page [217]-229.

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations.

Subjects--Topical Terms:
Microelectromechanical systems.
Silicon carbide.
Mechanical engineering.
Dissertations, Academic--Malaysia.

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(3C-SiC) silicon carbide MEMS capacitive pressure sensor for high temperature applications /

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