Introduction to microelectronic fabrication /
Jaeger, Richard C.,
Introduction to microelectronic fabrication / Richard C. Jaeger. - Second edition. - 320 pages : illustrations ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5 .
9789814576291 RM618.24
Integrated circuits--Very large scale integration--Design and construction--Textbooks.
Introduction to microelectronic fabrication / Richard C. Jaeger. - Second edition. - 320 pages : illustrations ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5 .
9789814576291 RM618.24
Integrated circuits--Very large scale integration--Design and construction--Textbooks.