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Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / edited by Stoyan Nihtianov, Antonio Luque. - 538 pages : illustrations ; 24 cm. - Woodhead publishing series in electronic and optical materials ; no. 51. . - Woodhead publishing series in electronic and optical materials ; no. 51. .

ISBN: 9780857095022 RM888.57

Subjects--Topical Terms:
Detectors.
Microelectromechanical systems.
Scanning systems.

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Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

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