Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /

Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / edited by Martin Feldman. - xxiv, 573 pages : illustrations ; 24 cm. - Woodhead publishing series in electronic and optical materials ; no. 42 . - Woodhead publishing series in electronic and optical materials ; no. 42 .

9780857095008 RM940.84


Nanolithography.

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