Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /
edited by Martin Feldman.
- xxiv, 573 pages : illustrations ; 24 cm.
- Woodhead publishing series in electronic and optical materials ; no. 42 .
- Woodhead publishing series in electronic and optical materials ; no. 42 .
9780857095008 RM940.84
Nanolithography.
9780857095008 RM940.84
Nanolithography.
