Metal-dielectric interfaces in gigascale electronics : thermal and electrical stability /
He, Ming.
Metal-dielectric interfaces in gigascale electronics : thermal and electrical stability / Ming He, Toh-Ming Lu. - New York : Springer, 2012. - xi, 149 p. : ill. (some col.) ; 24 cm. - Springer series in materials science ; v. 157. . - Springer series in materials science ; v. 157. .
Includes bibliographical references and index.
9781461418115 (hbk.) RM372.41
Microelectronics--Materials
Interfaces (Physical sciences)
Metal-dielectric interfaces in gigascale electronics : thermal and electrical stability / Ming He, Toh-Ming Lu. - New York : Springer, 2012. - xi, 149 p. : ill. (some col.) ; 24 cm. - Springer series in materials science ; v. 157. . - Springer series in materials science ; v. 157. .
Includes bibliographical references and index.
9781461418115 (hbk.) RM372.41
Microelectronics--Materials
Interfaces (Physical sciences)