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Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /

Muhammad Ramdzan Buyong.

Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS / Muhammad Ramdzan bin Buyong. - 2010. - xxvi, 201 p. : ill. charts, photographs, ; 30 cm.

Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010.

Rujukan : p. 194-198.

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations.

Subjects--Topical Terms:
Dissertations, Academic--Malaysia.
BioMEMS.
Metal oxide semiconductors.
Detectors.
Microelectronics.
Microelectromechanical systems.
Electromechanical devices.

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Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /

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