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Handbook of cleaning for semiconductor manufacturing : fundamentals and applications /

Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / [edited by] Karen A. Reinhardt, Richard F. Reidy. - Salem, Mass. : Scrivener, 2011 - xxii, 590 p. : ill. ; 26 cm.

Includes bibliographical references and index.

ISBN: 9780470625958 (hbk.) RM761.79

Subjects--Topical Terms:
Semiconductors--Surfaces.

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Handbook of cleaning for semiconductor manufacturing : fundamentals and applications /

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