Radiation defects in ion implanted and/or high-energy irradiated MOS structures /
Kaschieva, S., 1962-
Radiation defects in ion implanted and/or high-energy irradiated MOS structures / S. Kaschieva and S.N. Dmitriev. - New York : Nova Science Publishers, 2010. - ix, 195 p. : ill. (some col.) ; 24 cm. - Electrical engineering developments series. . - Electrical engineering developments series. .
Includes bibliographical references and index.
9781608761883 (hbk.) RM261.13 1608761886 (hbk.)
Metal oxide semiconductors.
Semiconductor doping.
Semiconductors--Effect of radiation on.
Ion implantation.
Radiation defects in ion implanted and/or high-energy irradiated MOS structures / S. Kaschieva and S.N. Dmitriev. - New York : Nova Science Publishers, 2010. - ix, 195 p. : ill. (some col.) ; 24 cm. - Electrical engineering developments series. . - Electrical engineering developments series. .
Includes bibliographical references and index.
9781608761883 (hbk.) RM261.13 1608761886 (hbk.)
Metal oxide semiconductors.
Semiconductor doping.
Semiconductors--Effect of radiation on.
Ion implantation.