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Principles of microelectromechanical systems /

Principles of microelectromechanical systems / edited by Ki Bang Lee. - Hoboken, N.J. : Wiley, 2010. - xii, 667 p. : ill. ; 24 cm.

ISBN: 9780470466346 RM443.55

Subjects--Topical Terms:
Microelectromechanical systems.

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