Computational lithography /
Ma, Xu, 1983-
Computational lithography / Xu Ma and Gonzalo R. Arce. - Hoboken, N.J. : Wiley, 2010. - xv, 226 p. : ill. ; 25 cm. - Wiley series in pure and applied optics . - Wiley series in pure and applied optics. .
Includes bibliographical references (p. 217-222) and index.
9780470596975 (hbk.) RM305.85
Microlithography--Mathematics.
Integrated circuits--Design and construction--Mathematics.
Photolithography--Mathematics.
Semiconductors--Etching--Mathematics.
Resolution (Optics)
Computational lithography / Xu Ma and Gonzalo R. Arce. - Hoboken, N.J. : Wiley, 2010. - xv, 226 p. : ill. ; 25 cm. - Wiley series in pure and applied optics . - Wiley series in pure and applied optics. .
Includes bibliographical references (p. 217-222) and index.
9780470596975 (hbk.) RM305.85
Microlithography--Mathematics.
Integrated circuits--Design and construction--Mathematics.
Photolithography--Mathematics.
Semiconductors--Etching--Mathematics.
Resolution (Optics)