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Introduction to microfabrication /

Franssila, Sami.

Introduction to microfabrication / Sami Franssila. - 2nd ed. - Chichester, West Sussex, England : John Wiley & Sons, 2010. - xiv, 518 p. : ill. ; 25 cm.

Includes index.

ISBN: 9780470749838 RM244.80

Subjects--Topical Terms:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.

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