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Advanced materials and technologies for micro/nano-devices, sensors and actuators

Advanced materials and technologies for micro/nano-devices, sensors and actuators [electronic resource] / edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. - Dordrecht : Springer Science+Business Media B.V., 2010. - 322 p. : ill. (some col.), digital ; 24 cm. - NATO Science for Peace and Security Series B : Physics and Biophysics, 1874-6500 .

ISBN: 9789048138074 (electronic bk.) 9789048138050 (paper)

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Chemistry.
Microengineering.

Dewey Class. No.: 621.381

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Advanced materials and technologies for micro/nano-devices, sensors and actuators

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