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Fundamental principles of engineering nanometrology /

Leach, Richard K.

Fundamental principles of engineering nanometrology / Professor Richard K. Leach - Oxford : William Andrew/Elsevier, 2010 - xxvi, 321 p. : ill. ; 24 cm.

Includes index

ISBN: 9780080964546 (hbk.) : RM424.83

Subjects--Topical Terms:
Nanotechnology
Microtechnology
Metrology

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