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Optical lithography : here is why /

Lin, Burn Jeng, 1942-

Optical lithography : here is why / Burn J. Lin. - Bellingham, Wash. : SPIE, 2009. - xiv, 477 p. : ill. ; 26 cm.

Includes index.

ISBN: 9780819475602 RM291.35

Subjects--Topical Terms:
Microlithography.
Semiconductors--Etching.
Lasers--Industrial applications.

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