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Contamination control and cleanrooms : problems, engineering solutions, and applications /

Lieberman, Alvin, 1921-

Contamination control and cleanrooms : problems, engineering solutions, and applications / Alvin Lieberman - New York : Van Nostrand Reinhold , 1992 - viii, 411 p. : ill. ; 24 cm.

ISBN: 0442005741 RM210.38

LCCN: 91-044921

Subjects--Topical Terms:
Clean rooms
Decontamination (From gases, chemicals, etc.)

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Contamination control and cleanrooms : problems, engineering solutions, and applications /

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