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Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal

Mohd Ismahadi Syono

Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal [microform]/ Mohd Ismahadi Syono - Bangi, Selangor : Perpustakaan Tun Seri Lanang, Universiti Kebangsaan Malaysia 2010 - 3 microfiches ; 11 x 15cm.

Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008

Rujukan : p. [153]-156

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Accelerometers
Microelectromechanical systems

Subjects--Index Terms: Thick epitaxial polysilicon

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Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal

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