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Pecvd hydrogenated amorphous carbon films : growth and characterization /

Rozidawati Awang

Pecvd hydrogenated amorphous carbon films : growth and characterization / Rozidawati binti Awang - 2008 - xx p. 184 : ill. ; 30 cm.

Thesis (Ph. D) - University of Malaya, 2008

References : p. 163-174

Subjects--Corporate Names:
Universiti Malaya--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Thin films
Hydrogenation

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Pecvd hydrogenated amorphous carbon films : growth and characterization /

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