MEMS design and fabrication /
MEMS design and fabrication / [electronic resource] :
edited by Mohamed Gad-el-Hak
- 2nd ed.
- Boca Raton, FL : CRC/Taylor & Francis, 2006
- Mechanical engineering series .
- Mechanical engineering series (Boca Raton, Fla.) .
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849391385
2005-050109
Microelectromechanical systems--Design and construction
Microfabrication
621.381
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849391385
2005-050109
Microelectromechanical systems--Design and construction
Microfabrication
621.381