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Nano- and microelectromechanical systems fundamentals of nano- and microengineering /

Lyshevski, Sergey Edward

Nano- and microelectromechanical systems fundamentals of nano- and microengineering / [electronic resource] : Sergey Edward Lyshevski - Boca Raton : CRC Press, c2001 - Nano- and microscience, engineering, technology, and medicine series .

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Includes bibliographical references and index

ISBN: 0849309166

LCCN: 00-057953

Subjects--Topical Terms:
Microelectromechanical systems

Dewey Class. No.: 621.381

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