Run-to-run control in semiconductor manufacturing
Run-to-run control in semiconductor manufacturing [electronic resource] /
edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz
- Boca Raton : CRC Press, 2001
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849311780
00-059910
Semiconductors--Design and construction
Semiconductor industry--Production control
Electronic packaging
Production management
621.3815/2
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849311780
00-059910
Semiconductors--Design and construction
Semiconductor industry--Production control
Electronic packaging
Production management
621.3815/2