Normal view MARC view ISBD view

X-ray metrology in semiconductor manufacturing

Bowen, D. Keith 1940-

X-ray metrology in semiconductor manufacturing [electronic resource] / D. Keith Bowen, Brian K. Tanner - Boca Raton : CRC/Taylor & Francis, 2006

Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen

Includes bibliographical references and index

ISBN: 0849339286 (alk. paper)

LCCN: 2005-052196

Nat. Bib. No.: GBA597324 bnb

Nat. Bib. Agency Control No.: 013338095 Uk

Subjects--Topical Terms:
Semiconductors--Design and construction--Quality control
Integrated circuits--Measurement
Semiconductor wafers--Inspection
X-rays--Diffraction
Fluroscopy

Dewey Class. No.: 621.3815/2

Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

X-ray metrology in semiconductor manufacturing

Contact Us

Copyright ©The National University of Malaysia Library