Scientific wet process technology for innovative LSI/FPD manufacturing
Scientific wet process technology for innovative LSI/FPD manufacturing [electronic resource] /
edited by Tadahiro Ohmi
- Boca Raton, FL : CRC/Taylor & Francis, 2006
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849335434 (alk. paper)
2005-024414
Semiconductors--Design and construction
Semiconductors--Cleaning
Integrated circuits--Design and construction
621.3815/2
Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen
Includes bibliographical references and index
0849335434 (alk. paper)
2005-024414
Semiconductors--Design and construction
Semiconductors--Cleaning
Integrated circuits--Design and construction
621.3815/2