Defects in microelectronic materials and devices

Defects in microelectronic materials and devices [electronic resource] / edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf - Boca Raton : CRC Press, c2009

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Includes bibliographical references and index

9781420043761

2008-018722


Microelectronics--Materials--Testing
Metal oxide semiconductor field-effect transistors--Testing
Integrated circuits--Defects

621.381

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