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Focused ion beam systems : basics and applications /

Focused ion beam systems : basics and applications / edited by Nan Yao - Cambridge : Cambridge University Press, 2007 - xi, 395 p. : ill. ; 26 cm.

Includes bibliographical references and index

ISBN: 9780521831994 (hbk.) RM513.00

Subjects--Topical Terms:
Focused ion beams
Focused ion beams--Industrial applications
Ion bombardment

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Focused ion beam systems : basics and applications /

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