Reactive Sputter Deposition
Reactive Sputter Deposition [electronic resource] /
edited by Diederik Depla, Stijn Mahieu.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2008.
- xviii, 570 p. : ill. (some col.), digital ; 25 cm.
- Springer Series in Materials Science, 109 0933-033X ; .
9783540766643 (electronic bk.) 9783540766629 (paper)
Cathode sputtering (Plating process)
Thin films.
Chemistry.
Condensed Matter.
Industrial Chemistry/Chemical Engineering.
Physical Chemistry.
Surfaces and Interfaces, Thin Films.
621.38152
9783540766643 (electronic bk.) 9783540766629 (paper)
Cathode sputtering (Plating process)
Thin films.
Chemistry.
Condensed Matter.
Industrial Chemistry/Chemical Engineering.
Physical Chemistry.
Surfaces and Interfaces, Thin Films.
621.38152