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Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /

Mohd Ismahadi Syono

Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal / Mohd Ismahadi Syono - Bangi : Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2008 - xvi, 187 p. : ill., photographs, charts ; 30 cm.

Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008

Rujukan : p. [153]-156

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Accelerometers
Microelectromechanical systems

Subjects--Index Terms: Thick epitaxial polysilicon

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Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /

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