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Fundamental principles of optical lithography : the science of microfabrication /

Mack, Chris A.

Fundamental principles of optical lithography : the science of microfabrication / Chris Mack - Chichester, England : John Wiley & Sons, 2007 - xvii, 515 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 9780470018934 (hbk.) RM692.00 0470018933 (hbk.) 9780470727300 (pbk.) 0470727306 (pbk.)

Subjects--Topical Terms:
Integrated circuits--Design and construction
Microlithography--Industrial applications

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Fundamental principles of optical lithography : the science of microfabrication /

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