Normal view MARC view ISBD view

Reliability of MEMS /

Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya - Weinheim : Wiley-VCH, 2008 - xx, 303 p. : ill. ; 25 cm. - Advanced micro & nanosystems ; v.6 .

'Testing of materials and devices' -- Cover

Includes bibliographical references and index

ISBN: 9783527314942 (hbk.) RM795.80 3527314946 (hbk.)

Subjects--Topical Terms:
Microelectromechanical systems--Reliability

Place hold
Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Reliability of MEMS /

Contact Us

Copyright ©The National University of Malaysia Library