Optical inspection of microsystems /
Optical inspection of microsystems /
edited by Wolfgang Osten
- Boca Raton, FL : CRC/Taylor & Francis, 2007
- 503 p., [8] p. of plates : ill. (some col.) ; 26 cm.
- Optical science and engineering ; 109 .
- Optical science and engineering (Boca Raton, Fla.) ; 109 .
Includes bibliographical references and index
0849336821 (alk. paper) 9780849336829 RM487.31
Quality control--Optical methods
Optical detectors--Industrial applications
Microelectronics
Includes bibliographical references and index
0849336821 (alk. paper) 9780849336829 RM487.31
Quality control--Optical methods
Optical detectors--Industrial applications
Microelectronics