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Sputtered silicon encapsulation : wafer level packaging for MEMs devices /

Azrul Azlan Hamzah

Sputtered silicon encapsulation : wafer level packaging for MEMs devices / Azrul Azlan Bin Hamzah - Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2008 - xxxv, 338 p. : ill. ; 30 cm.

Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008

References : p. [315] - 327

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Microelectronic packaging
Microelectromechanical systems
Microelectronic

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Sputtered silicon encapsulation : wafer level packaging for MEMs devices /

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