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Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /

Mattox, D. M.

Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control / by Donald M. Mattox - Westwood, New Jersey : Noyes Publications, 1998 - xxvii, 917 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 0815514220 9780815514220 RM881.46

Subjects--Topical Terms:
Physical vapor deposition--Handbooks, manuals, etc.

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Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /

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