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CMOS Hotplate Chemical Microsensors

CMOS Hotplate Chemical Microsensors [electronic resource] / by Markus Graf ... [et al.]. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007. - xii, 125 p. : ill. (some col.), digital ; 24 cm. - Microtechnology and MEMS, 1615-8326 .

ISBN: 9783540695622 (electronic bk.)

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Microfabrication.

LC Class. No.: TK7875 / .C64 2007

Dewey Class. No.: 621.38

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CMOS Hotplate Chemical Microsensors

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