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Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models /

Bechtold, Tamara.

Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models / [electronic resource] : by Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007. - 1online resource (xi, 180 p.) : ill. (some col.), digital ; 24 cm.

ISBN: 9783540346135 (electronic bk.) 9783540346128 (paper)

Subjects--Topical Terms:
Microelectromechanical systems--Mathematical models.
Engineering.
Electronics and Microelectronics, Instrumentation.

LC Class. No.: TK7875 / .B43 2007

Dewey Class. No.: 621.381

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Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models /

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